JPS51139262A - Method of manufacturing super-high frequency integrated circuit - Google Patents

Method of manufacturing super-high frequency integrated circuit

Info

Publication number
JPS51139262A
JPS51139262A JP6330375A JP6330375A JPS51139262A JP S51139262 A JPS51139262 A JP S51139262A JP 6330375 A JP6330375 A JP 6330375A JP 6330375 A JP6330375 A JP 6330375A JP S51139262 A JPS51139262 A JP S51139262A
Authority
JP
Japan
Prior art keywords
integrated circuit
high frequency
frequency integrated
manufacturing super
ridge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6330375A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5751946B2 (en]
Inventor
Shoji Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6330375A priority Critical patent/JPS51139262A/ja
Publication of JPS51139262A publication Critical patent/JPS51139262A/ja
Publication of JPS5751946B2 publication Critical patent/JPS5751946B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Junction Field-Effect Transistors (AREA)
JP6330375A 1975-05-27 1975-05-27 Method of manufacturing super-high frequency integrated circuit Granted JPS51139262A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6330375A JPS51139262A (en) 1975-05-27 1975-05-27 Method of manufacturing super-high frequency integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6330375A JPS51139262A (en) 1975-05-27 1975-05-27 Method of manufacturing super-high frequency integrated circuit

Publications (2)

Publication Number Publication Date
JPS51139262A true JPS51139262A (en) 1976-12-01
JPS5751946B2 JPS5751946B2 (en]) 1982-11-05

Family

ID=13225388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6330375A Granted JPS51139262A (en) 1975-05-27 1975-05-27 Method of manufacturing super-high frequency integrated circuit

Country Status (1)

Country Link
JP (1) JPS51139262A (en])

Also Published As

Publication number Publication date
JPS5751946B2 (en]) 1982-11-05

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